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By the end of the decade, Cymer had shipped more than 3,300 KrF (248 nm) and ArF (193 nm) and ArF Immersion light sources world-wide.
The Nike laser at the United States Naval Research Laboratory in Washington, DC is a 56 beam, 4-5 kJ per pulse electron beam pumped krypton fluoride excimer laser which operates in the ultraviolet at 248 nm with pulsewidths of a few nanoseconds.