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In 1605 he married Margaret Plunkett, daughter of Oliver Plunkett, 4th Baron Louth and Frances, sister of Henry Bagenal.
Lord FitzWilliam married firstly Mary Stapleton, daughter of the leading Parliamentarian Sir Philip Stapleton, a somewhat surprising marriage given the deep division on religion and politics between the two families.
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He married secondly Elizabeth Pitt, daughter of George Pitt of Strathfieldsaye; she was a distant cousin of William Pitt the Elder.